发明名称 METHOD FOR GROWING SINGLE CRYSTAL OF SEMICONDUCTOR
摘要 By utilizing a crystal pulling apparatus for producing a single crystal according to the Czochralski method comprising at least a crucible to be charged with a raw material, a heater surrounding the crucible, and subsidiary heating means provided below the crucible, a single crystal is pulled or the raw material is additionally introduced with heating by the heater surrounding the crucible and the subsidiary heating means when the amount of the raw material melt in the crucible becomes a limited amount. Thus, there is provided a method for growing a single crystal at a high yield while preventing solidification of melt raw material decreased to a limited amount without affecting crystal quality, durability of crucible or the like even when a crucible having a large diameter is used. <IMAGE>
申请公布号 EP1199387(A4) 申请公布日期 2009.03.25
申请号 EP20010904510 申请日期 2001.02.16
申请人 SHIN-ETSU HANDOTAI CO., LTD. 发明人 KIMURA, MASANORI
分类号 C30B15/14;(IPC1-7):C30B15/14;C30B29/06 主分类号 C30B15/14
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