| 摘要 |
<p>A substrate treatment apparatus is provided to consecutively carry the substrate in the substrate processing part by using the cassette loading part by loading temporally the empty cassette on the empty cassette loader instead of the cassette loader. When the cassette (C) carried in and carrier out the processing unit, the cassette is loaded in the cassette load stock(12). The substrate transfer part(2) transfers the substrate to the substrate processing part. The substrate processing part(3) processes the transferred substrate. The substrate transfer part transfers the processed substrate in the cassette of the cassette loading part. After the substrate is transferred to the substrate processing part, the blank cassette loading part(20) temporally loads the empty cassette. The ball cassette transfer tool transfers the empty cassette between the blank cassette loading part and the cassette loading part.</p> |
