| 摘要 |
<p>A carry in and out chamber, transfer chamber, process chamber, vacuum processing system having the same, an articles transferring method are provided to reduce each wall thickness of the chamber housing by simplifying the transfer method of the workpiece for vacuum processing system. The import/export chamber(100) comprises the chamber housing and transport mechanism(120). The transport mechanism is arranged within the chamber housing. The transport mechanism transfers the workpiece(G). The first path and second paths(111, 112) are formed in the side wall of the chamber housing. The workpiece passes through the first path and the second path. The first and the second path is individually opened and closed by the first and the second on off valve. The transport mechanism comprises a plurality of transferring rollers(121) and driving part(130).</p> |
