| 摘要 |
A non-contact panel cleaning apparatus is provided to clean an FPD panel while the FPD is floated by air, thereby preventing a scratch due to contact when cleaning a panel surface. A take in transfer unit(10) comprises a transfer pad(11) formed in a rectangular plate shape. A take in transfer support unit(12) supports a lower part of the transfer pad. A plurality of transfer nozzles(131a) is installed at both side ends of the transfer pad. The take in transfer support unit supplies compressed air passed through the transfer pad. A take in panel fixing unit(13a) comprises a fixing unit pad formed by a porous medium. A cleaning dry unit(20) cleans the panel transferred along with a panel transfer path(C) by cleaning solution and dries the panel. |
