Mirror-changing confocal optical device

摘要

Confocal optical device for illuminating points on a sample 807 using illuminating beams FE and for detecting beams FD coming from the illuminated points and passing through a pinholes array 806. An exchangeable block 600 comprising a beamsplitter 602 and a redirection mirror 603 is used to superimpose the optical pathes of the illuminating beams FE and the beams to be detected FD.