发明名称 Silicon electrode assembly surface decontamination by acidic solution
摘要 Methods for cleaning silicon surfaces of electrode assemblies by efficiently removing contaminants from the silicon surfaces without discoloring the silicon surfaces using an acidic solution comprising hydrofluoric acid, nitric acid, acetic acid, and balance deionized water.
申请公布号 US7507670(B2) 申请公布日期 2009.03.24
申请号 US20040019726 申请日期 2004.12.23
申请人 LAM RESEARCH CORPORATION 发明人 SHIH HONG;HUANG TUOCHUAN;ZHOU CHUNHONG
分类号 H01L21/302 主分类号 H01L21/302
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