CHEMICAL FOR SEMICONDUCTOR PROCESS SUPPLY DEVICE AND A SUPPLYING METHOD OF CHEMICAL FOR SEMICONDUCTOR

摘要

A chemical for a semiconductor process supply device and a supplying method of chemical for semiconductor is provided to supply chemical a semiconductor process chamber by supplying the chemical to the process chamber as much as not interfering a process variable. A first container(110) is formed in order to store chemical , and a second container(120) is connected by the first container and a conduit line. The chemical is stored in the second container, and an on-off valve(130) is installed at the conduit line connecting the first container and the second container. The on-off valve is controlled by an external signal, and a pressure sensor(140) measures the inner pressure of the first container. The pressure sensor outputs the measured pressure to a signal, and a controller(150) is electrically connected to the pressure sensor. The controller receives the inner pressure of the first container to the electrical signal, and control on-off the valve according to the pressure change of the first container.