发明名称 |
X-RAY PIXEL DETECTOR DEVICE AND FABRICATION METHOD |
摘要 |
A method and a device are disclosed for producing an X-ray pixel detector, i.e. an imaging detector for X-ray photons, the detector presenting high efficiency combined with high resolution for obtaining a high image quality detector while at the same time minimizing the X-ray dose used. The application is particularly important whenever the X-ray photon absorption distance is much longer than the required pixel size. The arrangement according to the present invention presents a structure based on light-guiding of secondarily produced photons within a scintillating pixel detector in conjunction with, a CCD or a CMOS pixel detector. The structure according to the invention presents a matrix (8) having deep pores (10) fabricated by high-aspect ratio silicon etching techniques producing very thin walls and with a pore spacing less or equal to the size of a pixel (2) of the image detector used. The pore matrix is subsequently filled by melting a scintillating material into the pores such that, in each pore, a single scintillating block is formed. The silicon matrix (8) may further utilize a reflective layer to increase light guiding down to the image detector chip.
|
申请公布号 |
CA2360931(C) |
申请公布日期 |
2009.03.24 |
申请号 |
CA20002360931 |
申请日期 |
2000.01.21 |
申请人 |
PETERSSON, STURE;LINNROS, JAN;FROJDH, CHRISTER |
发明人 |
PETERSSON, STURE;LINNROS, JAN;FROJDH, CHRISTER |
分类号 |
G01T1/20 |
主分类号 |
G01T1/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|