发明名称 Image sensor applied with device isolation technique for reducing dark signals and fabrication method thereof
摘要 The present invention relates to an image sensor applied with a device isolation technique for reducing dark signals and a fabrication method thereof. The image sensor includes: a logic unit; and a light collection unit in which a plurality of photodiodes is formed, wherein the photodiodes are isolated from each other by a field ion-implantation region formed under a surface of a substrate and an insulation layer formed on the surface of the substrate.
申请公布号 US7507614(B2) 申请公布日期 2009.03.24
申请号 US20070890991 申请日期 2007.08.08
申请人 HYNIX SEMICONDUCTOR, INC. 发明人 RIM JAE-YOUNG;KO HO-SOON
分类号 H01L21/316;H01L21/84;H01L21/00;H01L21/336;H01L21/76;H01L27/14;H01L27/146;H01L31/00;H04N5/335;H04N5/361;H04N5/369;H04N5/374 主分类号 H01L21/316
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