发明名称 Semiconductor device and method for fabricating the same
摘要 A semiconductor device capable of preventing a bridge generation during performing an etching process to form a plurality of gate structures on a substrate divided into an active region and a field region and an electrical short between a contact plug and the individual gate structure in the field region and a method for fabricating the same are provided. The semiconductor device includes: a substrate provided with an active region and a field region; a field oxide layer formed in the field region in such a way that the field oxide layer is recessed to be lower than a surface of the substrate disposed in the active region; and a plurality of gate structures formed on the field oxide layer and the substrate in the active region.
申请公布号 US7508029(B2) 申请公布日期 2009.03.24
申请号 US20070706912 申请日期 2007.02.13
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE SUNG-KWON
分类号 H01L29/94 主分类号 H01L29/94
代理机构 代理人
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