| 摘要 |
A on-line system of a semiconductor manufacturing apparatus and a control method thereof capable of efficiently using a semiconductor manufacturing device are provided to prevent the mistake of a worker and control the central management of the semiconductor manufacturing apparatus. A manufacturing apparatus for a semiconductor(100) includes a keyboard(102), an arm(106), a monitor(110), a chamber(108) and a controller(104). Each key formed in a keyboard, a relay driven by the control signal inputted from a host computer(200) is installed. A recipe according to the recipe information data inputted through the host computer is set up in the host computer. If the recipe is set up by keyboard, the controller controls a chamber for progressing a semiconductor manufacturing process after confirming whether a rot is tracked in by the arm. The arm loads or unloads cassette loaded by a wafer according to the control of the controller. The chamber removes photoresist formed in the wafer. |
