| 摘要 |
A method of printing multi-layer masks includes analyzing masking requirements of the photomask includes creating pairings of all masking layers requiring substantially similar processing, wherein the pairings include less critical sub-fields that are capable of printing on laser lithography tools, and more critical sub-fields that require e-beam for printing, coating the photomask with a photoresist, exposing the less critical sub-fields and non-critical mask patterns on a laser mask writer where a maximum image size and image placement control are not required, moving the photomask to an e-beam mask writing tool, exposing the more critical sub-fields and patterns that require a maximum image size and placement control with the e-beam mask writing tool, developing the photoresist to reveal latent images that are formed in the e-beam mask writing tool and laser mask writer, transferring pattern of the photoresist to an underlying masking layer using one of direct chemical attack or reactive-ion etching, and removing the photoresist from the photomask.
|
