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经营范围
发明名称
Large area substrate cleaning apparatus
摘要
申请公布号
KR20090002849(U)
申请公布日期
2009.03.23
申请号
KR20070015549U
申请日期
2007.09.18
申请人
发明人
分类号
G02F1/13
主分类号
G02F1/13
代理机构
代理人
主权项
地址
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