| 摘要 |
A capacitor type silicon MEMS microphone is provided to have a high sensitive property by efficiently securing a sound pressure distribution space without an etching of a silicon substrate. A capacitor type silicon MEMS microphone(100) comprises a vibration plate(120), a silicon substrate(110), an insulating film(140), a capacitor(150), a sound pressure distribution space(160), and an interval support insulating film(130). The vibration plate is vibrated according to an external sound. The silicone substrate is an electrode plate of the capacitor. The capacitor converts an external sound into an electric signal. The insulating film insulates the vibration plate and the silicone substrate, and has a high dielectric constant. The sound pressure distribution space distributes a sound pressure. The capacitor reacts to the sound pressure. The interval support insulating film is positioned on the insulating film, and supports the vibration plate. |
