发明名称 APPARATUS FOR SUPPLYING ISOPROPYL ALCOHOL LIQUID
摘要 An isopropyl alcohol solution supplying apparatus is provided to prevent the generation of the bubble in the isopropyl alcohol solution. An isopropyl alcohol solution supplying apparatus(100) comprises a cylinder(110), a piston member(120), and an exhausting unit(112). The cylinder receives the pressurized nitrogen gas and the isopropyl alcohol solution. The isopropyl alcohol solution is discharged through the bottom side of cylinder. The piston member is arranged in the cylinder inside. The piston member moves to the upper side of cylinder by the feed pressure of the isopropyl alcohol solution. The piston member moves to the lower side of cylinder by the feed pressure of the nitrogen.
申请公布号 KR20090029376(A) 申请公布日期 2009.03.23
申请号 KR20070094562 申请日期 2007.09.18
申请人 SEMES CO., LTD. 发明人 YOUN, JUN HEE;OH, RAE TAEK
分类号 H01L21/304;H01L21/02 主分类号 H01L21/304
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