| 摘要 |
<p>A positional shift detecting apparatus for a subject to be processed is arranged on a transfer mechanism. In the transfer mechanism, a plurality of arm sections are turnably connected in series and the subject is transferred by holding the subject by the leading edge arm section. The positional shift detecting apparatus is provided with an edge detecting means, which is arranged at an arm section other than the leading edge arm section among the arm sections, for detecting at least an edge of the subject held by the leading edge arm section. The positional shift detecting apparatus is also provided with a positional shift detecting section for obtaining a positional shift of the subject based on the detection value obtained from the edge detecting means.</p> |
