发明名称 |
Micro-electro-mechanical valves and pumps |
摘要 |
Methods of fabricating micro-valves and micro-pumps. The micro-valves and micro-pumps that are fabricated include electrically conductive diaphragms fabricated from electrically conductive nano-fibers. Fluid flow through the micro-valves and pumping action of the micro-pumps is accomplished by applying electrostatic forces to the electrically conductive diaphragms.
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申请公布号 |
US7505110(B2) |
申请公布日期 |
2009.03.17 |
申请号 |
US20060276772 |
申请日期 |
2006.03.14 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
FURUKAWA TOSHIHARU;HAKEY MARK CHARLES;HOLMES STEVEN JOHN;HORAK DAVID VACLAV;KOBURGER, III CHARLES WILLIAM |
分类号 |
F16K31/02 |
主分类号 |
F16K31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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