SOFT STAMPING DEVICE

摘要

A soft stamping device is provided to control the displacement and load with the high precision and to easily form the micro-pattern. The stamp is connected in the stamp chuck. The stamp chuck is combined to the frame. The frame supports the stamp chuck to the set-up height. The substrate chuck(150) is located in the lower part of the stamp chuck. The displacement movement part(160) is arranged in the lower part of the substrate chuck and elevates the substrate chuck. The location alignment monitoring part is positioned on the top of the stamp chuck and grasps the location of substrate and stamp. The operation control part operates the displacement movement part according to the grasped location information.