发明名称 Semiconductor device with a floating gate electrode that includes a plurality of particles
摘要 The present invention provides a semiconductor device capable of being mass-produced and a manufacturing method of the semiconductor device. The present invention also provides a semiconductor device using an extreme thin integrated circuit and a manufacturing method of the semiconductor device. Further, the present invention provides a low power consumption semiconductor device and a manufacturing method of the semiconductor device. According to one aspect of the present invention, a semiconductor device that has a semiconductor nonvolatile memory element transistor over an insulating surface in which a floating gate electrode of the memory transistor is formed by a plurality of conductive particles or semiconductor particles is provided.
申请公布号 US7504663(B2) 申请公布日期 2009.03.17
申请号 US20050136705 申请日期 2005.05.25
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI;ISOBE ATSUO;YAMAGUCHI TETSUJI;GODO HIROMICHI
分类号 H01L29/786;H01L21/77;H01L21/8247;H01L21/84;H01L27/12;H01L27/13;H01L29/788 主分类号 H01L29/786
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