发明名称 Optical method for the characterization of laterally patterned samples in integrated circuits
摘要 Disclosed is a method for characterizing a sample having a structure disposed on or within the sample, comprising the steps of applying a first pulse of light to a surface of the sample for creating a propagating strain pulse in the sample, applying a second pulse of light to the surface so that the second pulse of light interacts with the propagating strain pulse in the sample, sensing from a reflection of the second pulse a change in optical response of the sample, and relating a time of occurrence of the change in optical response to at least one dimension of the structure.
申请公布号 US7505154(B2) 申请公布日期 2009.03.17
申请号 US20080072841 申请日期 2008.02.28
申请人 BROWN UNIVERSITY 发明人 MARIS HUMPHREY J.
分类号 G01B11/28;G01B11/02;G01B11/06;G01N21/17;G01N21/21;G01N21/47;G01N21/95;G01N21/956;G01N29/24 主分类号 G01B11/28
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