| 摘要 |
<p>A gas supply unit has a connection block with a rectangular solid shape, and a solenoid valve block made up of solenoid valves and a speed controller block made up of speed controllers are connected to one side face of the connection block. In the connection block, there are formed first flow paths and second flow paths.The first flow paths are for connection between each solenoid valve and each speed controller that correspond to each other, and the second flow paths are communicated to the other side face from the speed controllers. In the output side of the second flow paths that is on the other side face are provided connection ports. Gas supply tubes communicated with gas pressure-type drive sections are connected to the connection ports via a multi-connector. The gas supply unit can stabilize quality of a gas supply facility for supplying gas to gas pressure-type drive sections used for substrate processing device.</p> |
