发明名称 Thin film transistor and flat panel display device including the same
摘要 A thin film transistor including a stop layer is disclosed. In one embodiment, the thin film transistor includes a substrate, a gate electrode formed on the substrate, a source electrode and a drain electrode insulated from the gate electrode, a semiconductor layer insulated from the gate electrode and having: a channel region which is electrically connected to the source electrode and the drain electrode, and a groove for separating at least the channel region from adjacent thin film transistors, and a stop layer formed below the semiconductor layer. According to one embodiment of the invention, a semiconductor layer can be easily patterned without using a dry or wet etching technique such as photolithography.
申请公布号 US7504659(B2) 申请公布日期 2009.03.17
申请号 US20060357004 申请日期 2006.02.16
申请人 发明人
分类号 H01L29/04 主分类号 H01L29/04
代理机构 代理人
主权项
地址