SETTING FRAME OF COATINGS FOR IN-LINE SPUTTERING SYSTEM

摘要

A coating material installation rack for an in-line sputtering device is provided to maximize the application of the in-line sputtering device as the various products of coating operations are effectively made. A coating material installation rack for an in-line sputtering device comprises: a rotating shaft installation frame(2) installed in inside of a rack(1) center to cross direction of the square shape; a plurality of coating material mounting frame(3) installed in an axis of rotation mounting frame to the longitudinal direction; and a circulation roller(22) installed on the axis of rotation in the axis of rotation mounting frame in regular intervals.