发明名称 RESIST STRIPPING AGENT
摘要 Disclosed is a resist stripping agent which has excellent stripping properties, which has no flammability and therefore is safe, and which does not cause corrosion of a conductive material and therefore has excellent anti-corrosion properties. The resist stripping agent comprises a compound represented by the formula (1). (1) wherein R3 represents an alkyl group having 1 to 18 carbon atoms, and R1 and R2 independently represent a hydrogen atom or a hydrocarbon group having 1 to 6 carbon atoms which may have an ether bond.
申请公布号 KR20090027191(A) 申请公布日期 2009.03.16
申请号 KR20087028027 申请日期 2008.11.17
申请人 IDEMITSU KOSAN CO., LTD. 发明人 SHIRAKI YASUSHI;FUJIOKA TOYOZO;MATSUO SHIGERU
分类号 G03F7/42 主分类号 G03F7/42
代理机构 代理人
主权项
地址