| 摘要 |
A gas bearing apparatus for elevating axes is provided to prevent damage to a lift unit by preventing washing solution and drying gas from flowing inside a gas bearing. A gas bearing apparatus for elevating axes comprises: a first engaging part(110) equipped in a process unit; a second engaging part(120) which is equipped in a lift unit, and is combined in the first engaging part to be ascended and descended; an elevating guide(112) which is equipped between the first engaging part and the second engaging part, and in which a buffer part(123) is formed in one side among the first and the second engaging parts; and a sealing gas offer part(130) providing the sealing gas for the elevating guide. |
