| 摘要 |
A substrate transport apparatus is provided to completely adhere the substrate closely to the vacuum hole of the fork plate and to minimize the incomplete loading of the substrate due to the vacuum fault. The fork plate(110) comprises the first plate(112), and the second plate(114) and the body(111). The first and the second plate can be moved in the traverse direction to the body. The position control part(130) sets up the loading location of the first and the second plate. The vacuum line(142) is connected to vacuum holes(116, 117, 118) and provides vacuum on the first and the second plate. When the first and the second plate contact with the substrate(100). The vacuum sensor(140) checks whether vacuum leaks out or not.
|
