OPTICAL WAVEGUIDE-TYPED SURFACE PLASMON RESONANCE SENSOR AND METHOD FOR MANUFACTURING THE SAME

摘要

An optical waveguide-typed surface plasmon resonance sensor and a manufacturing method thereof are provided to manufacture metallic foil in a small size and measure extremely small quantities of liquid or gas by forming the metallic foil on the side of a light guide portion. A surface plasmon resonance sensor(300) comprises: a substrate; an optical source portion(320) which produces the test light and emitted; a light guide portion(330) which is formed on the substrate in a plate shape and guides test light; a metallic foil(340) which is formed in one side of the light guide portion and forms surface plasma waves; and an optical detecting portion(350) which is reflected with the metallic foil and detects the test light irradiated through the light guide portion. The metallic foil reflects the test light which is incident at the angle except predetermined incident angle.