| 发明名称 |
ANTISTATISCHES MITTEL, ANTISTATISCHER FILM UND MIT ANTISTATISCHEM FILM BESCHICHTETES PRODUKT |
| 摘要 |
The invention relates to an antistatic agent, which comprises a water-soluble electroconductive polymer and a biosurfactant having a hydrophilic site of a molecular weight of 200 to 10,000, excellent in property of preventing film-thinning in chemically amplified resist, and an antistatic film and a coated product obtained by using the antistatic agent. |
| 申请公布号 |
AT423383(T) |
申请公布日期 |
2009.03.15 |
| 申请号 |
AT20050770798T |
申请日期 |
2005.08.05 |
| 申请人 |
SHOWA DENKO KABUSHIKI KAISHA |
发明人 |
OHKUBO, T.;SAIDA, YOSHIHIRO;NAIJO, S. |
| 分类号 |
H01B1/20;H01B1/12 |
主分类号 |
H01B1/20 |
| 代理机构 |
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