THERMISCHER DETEKTOR MIT WABENFÖRMIGER STRUKTUR FÜR ELEKTROMAGNETISCHE STRAHLUNG

摘要

The detector has an absorbent membrane (1) fixed to a suspension on a front side of a substrate (2) using an insulating support with a set of alveolate structures. Each structure is disposed between the membrane and the substrate. The support has a set of arms (3) integrated with the membrane. Each structure has a number of thin layers separated by spacers (8), and disposed between corresponding arm and substrate.