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发明名称
SUSZEPTORSYSTEM
摘要
申请公布号
AT423226(T)
申请公布日期
2009.03.15
申请号
AT20020808223T
申请日期
2002.12.10
申请人
E.T.C. EPITAXIAL TECHNOLOGY CENTER SRL
发明人
MACCALLI, GIACOMO;VALENTE, GIANLUCA;KORDINA, OLLE;PRETI, FRANCO;CRIPPA, DANILO
分类号
C23C16/46;C23C16/458;C30B25/10;C30B25/12;C30B31/12;C30B31/14;F27B14/06;H01L21/00;H01L21/687;H05B6/02
主分类号
C23C16/46
代理机构
代理人
主权项
地址
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