ULTRASONIC TRANSDUCER, ULTRASONIC DIAGNOSTIC APPARATUS AND ULTRASONIC MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic capacitance type ultrasonic transducer which is small-sized and is capable of transmitting/receiving ultrasonic waves at frequencies of wide bands without reducing a transmission strength and a reception strength of ultrasonic waves, and to provide an ultrasonic diagnostic device and ultrasonic microscope.

SOLUTION: In an ultrasonic transducer comprising a first electrode, a vibrating film disposed on the first electrode while being separated by a cavity hole portion and a second electrode supported on the vibrating film, the hole portion is configured by providing a plurality of void parts having different cross-sectional areas when viewed from a side of the second electrode successively in a direction from the first electrode to the second electrode.

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