ULTRASONIC TRANSDUCER, METHOD OF MANUFACTURING ULTRASONIC TRANSDUCER, ULTRASONIC DIAGNOSTIC APPARATUS, AND ULTRASONIC MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic capacity type ultrasonic transducer which can be made compact while eliminating the need to supply a DC bias voltage by providing an electret, and to provide a method of manufacturing the ultrasonic transducer, an ultrasonic diagnostic apparatus, and an ultrasonic microscope. SOLUTION: The ultrasonic transducer includes: a vibrator cell including a first electrode, a vibrating membrane disposed over the first electrode across an air gap portion, and a second electrode supported by the vibrating membrane; and the electret for applying a potential difference between the electrodes. In a region apart from the vibrator cell when viewed from a transmitting direction of ultrasonic waves, the electret is interposed between a first conductive layer electrically connected to the first electrode and a second conductor layer electrically connected to the second electrode disposed opposite on the first conductive layer. COPYRIGHT: (C)2009,JPO&INPIT