| 摘要 |
PROBLEM TO BE SOLVED: To provide a monitoring method of a manufacturing process, capable of automatically detecting an executing time of maintenance of a manufacturing device. SOLUTION: Wavelet transform signal are obtained for a plurality of frequency bands by executing wavelet transform to a measurement signal output from an LSI manufacturing device (S3). When the wavelet transform signals for al the frequency bands are not smaller than a threshold value, it is determined that the maintenance of the manufacturing device has been executed, and in the cases other than that, it is determined that the maintenance has not been executed (S4). When it is determined that the maintenance has been executed, an alarm is not issued (S5), and a new management range is set based on a measurement signal output after the maintenance (S6). When it is determined that the maintenance has not been executed, whether the measurement signal is within the management range is determined (S7), and it is determined that abnormality has occurred in the manufacturing device when the measurement device is not within the management range, and an alarm is issued (S8). COPYRIGHT: (C)2009,JPO&INPIT
|
