| 摘要 |
PROBLEM TO BE SOLVED: To shorten the exhaust time of a vacuum chamber and reduce the exhaust energy thereof by temporarily connecting the vacuum chamber with vacuum reservoir tanks instead of directly introducing air or gas into the vacuum chamber when the vacuum chamber in a vacuum state is returned to an atmospheric pressure state. SOLUTION: The vacuum chamber 1 and one or more vacuum reservoir tanks 20 are connected to each other in order during the discharge and the vent to the atmosphere of the vacuum chamber 1. Therefore, the exhaust time of the vacuum chamber 1 and the exhaust energy thereof are reduced. Also, the discharge time of the vacuum chamber 1 can be more reduced by utilizing a vacuum pump 2 normally in an idling state. COPYRIGHT: (C)2009,JPO&INPIT
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