| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a TFT substrate and a manufacturing method thereof that can improve productivity. <P>SOLUTION: The T FT substrate 100 according to the present invention has a semiconductor film 4 having a source region 3a and a drain region 4b, a source electrode 11 electrically connected to the source region 3a and formed of a transparent conductive film 2a on the source region 4a, a drain electrode 12 electrically connected to the drain region 4b and formed of the transparent conductive film 21 on the drain region 4b, a pixel electrode 13 formed to extend from the drain electrode 12 and project from the semiconductor film 4, and a wiring 14 electrically connected to the source electrode 11 and formed of an upper conductive film 22 on the source electrode 11 not to project from the source electrode 11. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
