发明名称 DUAL GATE OXIDE DEVICE INTEGRATION
摘要 A method of forming devices including forming a first region and a second region in a semiconductor substrate is provided. The method further includes forming a semiconductive material over the first region, wherein the semiconductive material has a different electrical property than the first semiconductor substrate, forming a first dielectric material over the first region, depositing a second dielectric material over the first dielectric material and over the second region, wherein the second dielectric material is different than the first dielectric material, and depositing a gate electrode material over the high dielectric constant material. In one embodiment, the semiconductive material is silicon germanium and the semiconductor substrate is silicon.
申请公布号 US2009068807(A1) 申请公布日期 2009.03.12
申请号 US20070851719 申请日期 2007.09.07
申请人 KARVE GAURI V;SAMAVEDAM SRIKANTH B;TAYLOR JR WILLIAM J 发明人 KARVE GAURI V.;SAMAVEDAM SRIKANTH B.;TAYLOR, JR. WILLIAM J.
分类号 H01L21/8234 主分类号 H01L21/8234
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