ELECTRONIC COMPONENT COOLING APPARATUS, AND TEST HEAD AND ELECTRONIC COMPONENT TESTING APPARATUS PROVIDED WITH ELECTRONIC COMPONENT COOLING APPARATUS

摘要

An electronic component cooling apparatus (30) is provided with a chiller (40) having a heat exchanger (41) for cooling a refrigerant and a first pump (42) for pressure-feeding the refrigerant; a water jacket (50A), which is mounted on a pin electronics card (20) and provided with a path (51) wherein the refrigerant can communicate; and a second pump (59A), which communicates with the path (51) and increases pressure to the refrigerant communicating in the path (51).