| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new film which can be used as a photocatalyst film with improved photoelectric conversion efficiency more than a conventional film, its manufacturing method, and a hydrogen generation apparatus using such a film and suitable for generating hydrogen from an aqueous solution. <P>SOLUTION: A semiconductor oxide film comprises a laminated structure of a first photocatalyst film including Ti-containing Fe<SB>2</SB>O<SB>3</SB>with an atom number ratio of Ti to Fe being 0.05 to 0.2 and a second photocatalyst film including TiO<SB>2</SB>, and the hydrogen generation apparatus using it. The method for manufacturing the semiconductor oxide film comprises the process of depositing a Ti-containing Fe<SB>2</SB>O<SB>3</SB>film with an atom number ratio of Ti to Fe being 0.05 to 0.2 by a sputtering method using α-Fe<SB>2</SB>O<SB>3</SB>and TiO<SB>2</SB>as a target material, depositing a TiO<SB>2</SB>film by the sputtering method using TiO<SB>2</SB>as the target material, and carrying out heat treatment of the formed film at 550 to 600°C. <P>COPYRIGHT: (C)2009,JPO&INPIT |
