| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method effectively using measures against head diffusion during bonding by a light shielding film formed on a transmission type liquid crystal display element substrate and the light shielding film. SOLUTION: The manufacturing method includes a process of pattern-forming the light shielding film 21 on a transparent substrate 20 according to a transistor formation region 25, a process of forming a silicon oxide film 22 over the entire surface, a process of flattening the silicon oxide film 22, a process of bonding a silicon substrate 23 onto the silicon oxide film 22, a process of a hydrogen rich layer 24 at a predetermined position by hydrogen ion injection, a process of separating the silicon substrate 23 at the part of the hydrogen rich layer 24, a process of polishing and removing the hydrogen rich layer 24, and a process of forming an integrated circuit on the silicon film 22, wherein a recognition mark 21A and an ID marking portion 21B is formed during the pattern formation of the light shielding film 21, and the silicon oxide film 22 is irradiated with laser light from the side of the transparent substrate 20 while the irradiation quantity of the laser light is varied depending upon whether the light shield film 21 is present. COPYRIGHT: (C)2009,JPO&INPIT
|
