| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a gas electric field ion source of a charged particle beam device having a charged particle beam column, capable of high resolution. <P>SOLUTION: The gas electric field ion source includes an emitter unit (155), a cooling unit (146), and a thermal conductivity unit for thermal conductivity from the cooling unit to the emitter unit, wherein the thermal conductivity unit is adapted for reduction of vibration transfer from the cooling unit to the emitter unit. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
