| 摘要 |
PROBLEM TO BE SOLVED: To perform waveform separation of an energy spectrum having overlap without using an energy spectrum of a standard sample. SOLUTION: An acceleration voltage is changed over between 5 kV and 10 kV; a sample 5 is irradiated with an electron beam of each the acceleration voltage, and energy spectrum signals D<SB>5 kV</SB>, D<SB>10 kV</SB>to the respective acceleration voltages obtained by respective pieces of the irradiation are stored in a storage device 14. Analysis information change rates r<SB>Ti</SB>, r<SB>N</SB>of Ti and N constituting the sample 5 are calculated from relation data of an ionization cross section to (energy of a primary electron beam/binding energy). Energy spectrum signals R<SB>5 kV</SB>(Ti), R<SB>5 kV</SB>(N) of the respective elements constituting the sample 5 are calculated from the energy spectrum signals D<SB>5 kV</SB>, D<SB>10 kV</SB>to the respective acceleration voltages stored in the storage device 14; the analysis information change rate r<SB>Ti</SB>of Ti, and the analysis information change rate r<SB>N</SB>of N, and the energy spectra of Ti and N constituting the sample 5 are displayed on a display device 15. COPYRIGHT: (C)2009,JPO&INPIT
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