发明名称 Method for Evaluating an Optical Imaging Process
摘要 A method includes calculating destructive interference conditions between two linearly s-polarized waves and between two linearly p-polarized waves, respectively, in dependence on varying parameters of the s- and p-polarized waves, representing the destructive interference conditions in a diagram, setting an optical radiation field to be used in the optical imaging process, and comparing the optical radiation field with the diagram.
申请公布号 US2009066951(A1) 申请公布日期 2009.03.12
申请号 US20070854017 申请日期 2007.09.12
申请人 MAERZ REINHARD 发明人 MAERZ REINHARD
分类号 G01J4/00 主分类号 G01J4/00
代理机构 代理人
主权项
地址