| 摘要 |
PROBLEM TO BE SOLVED: To provide an XY stage that is easily assembled while achieving flatness of an X stage, a Y stage and a stage to be moved and attains reduction of manufacturing cost, and a photographing apparatus including the XY stage. SOLUTION: The X stage 113A is supported at three points, i.e., two bearings A1 and A2 of a guide shaft G1, and a support shaft G2. The Y stage 113B is also supported at three points, i.e., two bearings A3 and A4 of a guide shaft, and a second support shaft G5, Two bearings B1 and B2 are provided on a second guide shaft G3 side of a CCD holder 112, which is a stage to be moved, and one bearing is provided on the first guide shaft G1 side of the CCD holder 112, and then the CCD holder 112 is supported at three points, i.e., the one bearing and the two bearings. The one bearing supporting the CCD holder is opened in a Y direction to be U-shaped so that the first guide shaft G1 is inserted therein, and the guide shaft G1 is supported on one side of this U-shaped bearing by receiving a biasing force applied by a spring SP1 of a lid member 114, so that the attitude of the CCD holder 112 in a Z direction is defined. COPYRIGHT: (C)2009,JPO&INPIT
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