| 摘要 |
Alignment assembly is used to center a sample on a moving stage system. The alignment assembly includes a pair of slides stacked on a stage with linear perpendicular movement relative to each other, and at least one actuator that is preferably physically separate from the linear slides and stage. The actuator(s) repeatedly extend an actuator arm to move the linear slides, and retract the arm for subsequent movement of the stage during and after the process of centering the sample in two dimensions on the stage. Either the stage system rotates, or multiple actuators are placed to move the alignment system in perpendicular directions relative to the stage, by repeatedly contacting only the top linear slide.
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