发明名称 |
Method and apparatus for the production of high purity tungsten hexafluoride |
摘要 |
Apparatus and methods for purifying WF6 gas by using carbonaceous materials are described. The apparatus and methods are particularly useful for removing high volatility impurities and for removing transition metal impurities, particularly chromium and molybdenum.
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申请公布号 |
US2009068086(A1) |
申请公布日期 |
2009.03.12 |
申请号 |
US20070899854 |
申请日期 |
2007.09.07 |
申请人 |
HOGLE RICHARD ALLEN;MA CE;PRECOURT DENNIS;WHITLOCK WALTER HUGH |
发明人 |
HOGLE RICHARD ALLEN;MA CE;PRECOURT DENNIS;WHITLOCK WALTER HUGH |
分类号 |
C01G41/04;B01D53/04;C01B31/10 |
主分类号 |
C01G41/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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