METHOD FOR PRODUCING FACET MIRRORS AND PROJECTION EXPOSURE APPARATUS,申请号WO2008EP01247-传众专利搜索

发明名称	METHOD FOR PRODUCING FACET MIRRORS AND PROJECTION EXPOSURE APPARATUS
摘要	The invention relates to methods for producing mirrors, in particular facet mirrors, and projection exposure apparatuses equipped with the mirrors according to the invention.
申请公布号	WO2008101656(A3)	申请公布日期	2009.03.12
申请号	WO2008EP01247	申请日期	2008.02.18
申请人	CARL ZEISS SMT AG;WARM, BERNDT;RENNON, SIGFRIED;DINGER, UDO;BAIER, JUERGEN;BURKART, STEFAN;KOUROUKLIS, CHRISTOS;CHUNG, HIN YIU ANTHONY;WIESNER, STEFAN;ENKISCH, HARTMUT;DENGEL, GUENTHER	发明人	WARM, BERNDT;RENNON, SIGFRIED;DINGER, UDO;BAIER, JUERGEN;BURKART, STEFAN;KOUROUKLIS, CHRISTOS;CHUNG, HIN YIU ANTHONY;WIESNER, STEFAN;ENKISCH, HARTMUT;DENGEL, GUENTHER
分类号	G02B5/09;G02B7/18;G03F7/20	主分类号	G02B5/09
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