| 摘要 |
<P>PROBLEM TO BE SOLVED: To drive a moving body in two dimensions with high precision by compensating an measurement error accompanying wavelength variation of a probe beam of a surface position sensor and by measuring positions of the moving body as to a vertical direction and an oblique direction of a predetermined movement surface using the compensated surface position sensor. <P>SOLUTION: The surface position sensor composed of a focus sensor FS occurs a measurement error due to variation in wavelength of the probe beam LB<SB>1</SB>. Here, an environment sensor WT is used to measure the wavelength λ of the probe beam LB<SB>1</SB>in the atmosphere in the sensor. According to the measurement result, an oscillation wavelength of a light source LD is adjusted. Alternatively, correction data on the surface position sensor for the wavelength λ is generated and used to correct the measurement result of the surface position sensor. The positions associated with the vertical direction and oblique direction of a predetermined movement surface of a stage is measured using the surface position sensor whose measurement error accompanying the wavelength variation is thus corrected to drive the stage in two dimensions with high precision. <P>COPYRIGHT: (C)2009,JPO&INPIT |
