| 摘要 |
<P>PROBLEM TO BE SOLVED: To process optical resin with high precision while reducing the production period and production cost. <P>SOLUTION: An optical resin layer of processing object is laminated on a substrate, an X-ray mask formation layer consisting of a first plating seed layer also serving to shade the X-rays for the optical resin layer and an X-ray resist layer is laminated on the optical resin layer, and then an intermediate mask formation layer consisting of a second plating seed layer also serving to shade the UV-rays for the X-ray mask formation layer and an UV resist layer is laminated on the X-ray mask formation layer, thus preparing a laminate substrate. A high-contrast X-ray mask is then formed on the X-ray mask formation layer by using the intermediate mask formed on the intermediate mask formation layer, and an optical resin layer is processed using the high-contrast X-ray mask formed on the X-ray mask formation layer. <P>COPYRIGHT: (C)2009,JPO&INPIT |
