| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermoelectric type gas sensor having high sensitivity. SOLUTION: This thermoelectric type gas sensor is constituted of a substrate 12, the thermoelectric film 13 formed on the upper surface of the substrate 12, and a catalyst 16 producing heat by the catalytic reaction caused by the contact with the gas to be detected formed at a predetermined place on the upper surface side of the thermoelectric film 13. The substrate 12 is a baked member comprising ceramics, and the thermoelectric film 13 is constituted of a single flat particle in a thickness direction and has a part oriented so as to contain a crystal surface enhanced in electronic conductivity. A gap is formed to a part between particles on a plan view in the thermoelectric film 13, and a gap is formed to a part on a lateral view at the boundary of the thermoelectric film 13 and the substrate 12. By this constitution, the heat conductivity of the substrate 12 and the thermoelectric film 13 can be reduced and the temperature difference in the thermoelectric film 13 produced with respect to catalytic reaction can be made large. In addition, the electronic conductivity of the thermoelectric film 13 becomes high and the generated voltage to the temperature difference in the thermoelectric film 13 can be made high. COPYRIGHT: (C)2009,JPO&INPIT
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