| 摘要 |
A vacuum pump arrangement, especially a turbomolecular pump arrangement, comprises a rotor (14) and a stator (16) in a pump housing (10). The pump housing (10) is connected to a vacuum chamber housing (26) through a pump flange (10). Retaining elements (34) are provided for this connection. To avoid a twisting of the retaining elements (34) in the event of a damage, such as the blocking of the rotor (14) and the high moments occurring thereby, the retaining element (34) comprises an anti-twist structure (40) cooperating with the vacuum chamber housing (26). |
